Now OAI, a semiconductor microlithography toolmaker, has mashed nanoimprint lithography into its mainstream tools as a swappable option, as reported by Small Times:
OAI adds nano imprint lithography option for mask aligners
August 1, 2007 -- OAI (Optical Associates Inc.) says that it has added to its mask aligners nano imprint lithography with sub-20 nm resolution. Working with Nanolithosolution Inc. (NLS), OAI is offering a nano imprint module as an option for all of the company's mask aligners -- which can then be used as imprint systems or as standard mask aligners (the module can be easily removed at any time). The module can be included with new orders or retrofit onto existing systems.... OAI's nano imprint module was developed by HP after years of research and development.
A nice solution, a fine differentiator for OAI (whose tools are touted for their flexibility), and a good way for deliberate and risk-averse chipmakers to position themselves to leverage this new technology.

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